IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of si-based photonic crystal stamps

2009 11th International Conference on Transparent Optical Networks (ICTON)

Author(s): Jannesari, R. ; Bergmair, I. ; Zamiri, S. ; Hingerl, K.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Ponta Delgada, Portugal, Portugal
Conference Date: 28 June 2009
Page(s): 1 - 4
ISBN (CD): 978-1-4244-4826-5
ISBN (Paper): 978-1-4244-4825-8
ISBN (Online): 978-1-4244-4827-2
DOI: 10.1109/ICTON.2009.5185311
Regular:

In this work we report on the technology for enabling the mass replication of custom-designed and e-beam lithographically prepared structures via establishing UV-NIL nanoimprint processes for... View More

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