IEEE - Institute of Electrical and Electronics Engineers, Inc. - Unique electrical characterization and in-line monitoring of nano-tipped defects in metal-insulator-metal capacitors

2009 IEEE International Reliability Physics Symposium (IRPS)

Author(s): Lieyi Sheng ; Snyder, E. ; Doub, J. ; Berti, V. ; Kriner, L. ; Glines, E.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2009
Conference Location: Montreal, QC, Canada, Canada
Conference Date: 26 April 2009
Page(s): 808 - 809
ISBN (CD): 978-1-4244-2889-2
ISBN (Paper): 978-1-4244-2888-5
ISSN (Paper): 1541-7026
DOI: 10.1109/IRPS.2009.5173355
Regular:

The unique characteristics of defective MIM capacitors under nano-ampere current injection and passive voltage contrast have verified the field enhancement and charge accumulation along nanotipped... View More

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