IEEE - Institute of Electrical and Electronics Engineers, Inc. - Filling of slot waveguides with Atomic Layer Deposition

2009 Conference on Lasers & Electro-Optics Europe & 11th European Quantum Electronics Conference (CLEO/EQEC)

Author(s): Alasaarela, T. ; Saynatjoki, A. ; Stenberg, P. ; Kuittinen, M. ; Honkanen, S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Munich, Germany, Germany
Conference Date: 14 June 2009
Page(s): 1
ISBN (CD): 978-1-4244-4080-1
ISBN (Paper): 978-1-4244-4079-5
DOI: 10.1109/CLEOE-EQEC.2009.5192589
Regular:

Slot waveguides are promising new nanostructures for confining light in low-index materials[1,2]. The most straightforward way to make vertical slot waveguides is to use the... View More

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