IEEE - Institute of Electrical and Electronics Engineers, Inc. - A 3.4 – 6.2 GHz Continuously tunable electrostatic MEMS resonator with quality factor of 460–530

2009 IEEE MTT-S International Microwave Symposium Digest (MTT)

Author(s): Xiaoguang Liu ; Katehi, L.P.B. ; Chappell, W.J. ; Peroulis, D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Boston, MA, USA, USA
Conference Date: 7 June 2009
Page(s): 1,149 - 1,152
ISBN (CD): 978-1-4244-2804-5
ISBN (Paper): 978-1-4244-2803-8
ISSN (Paper): 0149-645X
DOI: 10.1109/MWSYM.2009.5165905
Regular:

In this paper we present the first MEMS electrostatically-tunable loaded-cavity resonator that simultaneously achieves a very high continuous tuning range of 6.2 GHz:3.4 GHz (1.8:1) and... View More

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