IEEE - Institute of Electrical and Electronics Engineers, Inc. - SU-8 micromachining of millimeter and submillimeter waveguide circuits

2009 IEEE MTT-S International Microwave Symposium Digest (MTT)

Author(s): Smith, C.H. ; Sklavonuos, A. ; Barker, N.S.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Boston, MA, USA, USA
Conference Date: 7 June 2009
Page(s): 961 - 964
ISBN (CD): 978-1-4244-2804-5
ISBN (Paper): 978-1-4244-2803-8
ISSN (Paper): 0149-645X
DOI: 10.1109/MWSYM.2009.5165858
Regular:

Micromachined WR 3.4 waveguide circuits are fabricated using a SU-8 micromachining process. In order to demonstrate the viability and repeatability of this process both straight waveguide sections... View More

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