IEEE - Institute of Electrical and Electronics Engineers, Inc. - Experimental quantification of temperature uncertainty for an array of thermally-sensitive MEMS cantilever beams

2009 IEEE Antennas and Propagation Society International Symposium (APSURSI)

Author(s): Scott, S. ; Peroulis, D.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: North Charleston, SC, USA, USA
Conference Date: 1 June 2009
Page(s): 1 - 4
ISBN (Paper): 978-1-4244-3647-7
ISSN (Paper): 1522-3965
DOI: 10.1109/APS.2009.5172178
Regular:

Presented in this paper is the experimental quantification of the temperature uncertainty in a MEMS thermally-tunable capacitor that is especially suited for harsh-environment applications. The... View More

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