IEEE - Institute of Electrical and Electronics Engineers, Inc. - RF MEMS Switch with low stress sensitivity and low actuation voltage

2009 IEEE International Symposium on Antennas & Propagation & USNC/URSI National Radio Science Meeting

Author(s): King Yuk Chan ; R. Ramer
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: Charleston, SC, USA
Conference Date: 1 June 2009
Page(s): 1 - 4
ISBN (Paper): 978-1-4244-3647-7
ISSN (Paper): 1522-3965
DOI: 10.1109/APS.2009.5172136
Regular:

Due to the development of micro-mechanical systems (MEMS), RF MEMS switches are being widely investigated. Although RF MEMS switches have been intensively studied, limited work was done on... View More

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