IEEE - Institute of Electrical and Electronics Engineers, Inc. - In-line inspection impact on Cycle Time and Yield

2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009)

Author(s): I. Tirkel ; N. Reshef ; G. Rabinowitz
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2009
Conference Location: Berlin, Germany
Conference Date: 10 May 2009
Page(s): 241 - 244
ISBN (CD): 978-1-4244-3615-6
ISBN (Paper): 978-1-4244-3614-9
ISSN (Electronic): 2376-6697
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.2009.5155992
Regular:

Semiconductor industry constantly drives for high yield and low cycle time (CT), while most current manufacturing practices consider them separately. This research investigates the relationship... View More

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