IEEE - Institute of Electrical and Electronics Engineers, Inc. - First Wafer Delay and setup: How to measure, define and improve First Wafer Delays and setup times in semiconductor fabs

2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009)

Author(s): S. Radloff ; M. Abravanel ; B. Rhoads ; D. Steeg ; P. van der Meulen ; M. Petraitis
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2009
Conference Location: Berlin, Germany
Conference Date: 10 May 2009
Page(s): 86 - 90
ISBN (CD): 978-1-4244-3615-6
ISBN (Paper): 978-1-4244-3614-9
ISSN (Electronic): 2376-6697
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.2009.5155959
Regular:

First wafer delay (FWD) has been identified as a barrier to reduced fab cycle time and increased equipment productivity. As such, initiatives to reduce first wafer delay have been proposed as a... View More

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