IEEE - Institute of Electrical and Electronics Engineers, Inc. - Tracking of design related defects hidden in the random defectivity in a production environment

2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2009)

Author(s): J.C. Le Denmat ; V. Charbois ; M.C. Luche ; G. Kerrien ; L. Couturier ; L. Karsenti ; M. Geshel
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2009
Conference Location: Berlin, Germany
Conference Date: 10 May 2009
Page(s): 5 - 13
ISBN (CD): 978-1-4244-3615-6
ISBN (Paper): 978-1-4244-3614-9
ISSN (Electronic): 2376-6697
ISSN (Paper): 1078-8743
DOI: 10.1109/ASMC.2009.5155943
Regular:

For mature technologies, main yield detractor is random defectivity. Nevertheless, some devices present higher defectivity than rest of devices. Out of process accident, design related defect is... View More

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