IEEE - Institute of Electrical and Electronics Engineers, Inc. - 3-D Stacked NAND Flash String with Tube Channel Structure Using Si and SiGe Selective Etch Process

2009 IEEE International Memory Workshop (IMW)

Author(s): Min-Kyu Jeong ; Hyuck-In Kwon ; Jong-Ho Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2009
Conference Location: Monterey, CA, USA, USA
Conference Date: 10 May 2009
Page(s): 1 - 2
ISBN (Paper): 978-1-4244-3762-7
DOI: 10.1109/IMW.2009.5090571
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