IEEE - Institute of Electrical and Electronics Engineers, Inc. - Identification model-based control system design for semiconductor manufacturing equipment

2009 4th IEEE Conference on Industrial Electronics and Applications (ICIEA)

Author(s): Hashimoto, S. ; Nitta, M. ; Shimosakai, K. ; Konuma, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 May 2009
Conference Location: Xian, China, China
Conference Date: 25 May 2009
Page(s): 1,735 - 1,740
ISBN (CD): 978-1-4244-2800-7
ISBN (Paper): 978-1-4244-2799-4
DOI: 10.1109/ICIEA.2009.5138494
Regular:

In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the axially moving factors leads to operational problems and limits their utility in... View More

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