IEEE - Institute of Electrical and Electronics Engineers, Inc. - A control approach to high-speed probe-based nanofabrication

2009 American Control Conference (ACC-09)

Author(s): Yan Yan ; Qingze Zou ; Zhiqun Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2009
Conference Location: St. Louis, MO, USA
Conference Date: 10 June 2009
Page(s): 295 - 300
ISBN (CD): 978-1-4244-4524-0
ISBN (Paper): 978-1-4244-4523-3
ISSN (Electronic): 2378-5861
ISSN (Uncategorized ISSN): 0743-1619
ISSN (Paper): 0743-1619
DOI: 10.1109/ACC.2009.5160378
Regular:

In this paper, an inversion-based feedforward control approach to achieve high-speed, large-range probe-based nanofabrication is proposed. Probe-based nanofabrication has attracted great interests... View More

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