IEEE - Institute of Electrical and Electronics Engineers, Inc. - Infrared heating and roller-based contact printing technology for the fabrication of micro/nano-structures

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

Author(s): Yung-Chun Lee ; Hsueh-Liang Chen ; Chun-Hung Chen ; Hung-Yi Lin
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2009
Conference Location: Shenzhen, China, China
Conference Date: 5 January 2009
Page(s): 779 - 782
ISBN (CD): 978-1-4244-4630-8
ISBN (Paper): 978-1-4244-4629-2
DOI: 10.1109/NEMS.2009.5068694
Regular:

This paper presents a new roller-based nano-imprinting method based on the Infrared assisted metal transfer technique. It utilizes a silicon mold which is deposited with a thin metal film for... View More

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