IEEE - Institute of Electrical and Electronics Engineers, Inc. - The future of automation for high-volume Wafer fabrication and ASIC manufacturing

Author(s): R.A. Hughes ; J.D. Shott
Sponsor(s): IEEE Publication
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 1986
Volume: 74
Page(s): 1,775 - 1,793
ISSN (Paper): 0018-9219
ISSN (Online): 1558-2256
DOI: 10.1109/PROC.1986.13691
Regular:

Faced with increasing technical and commercial challenges from the Far East, many U.S. semiconductor manufacturers have been directing their efforts toward the Application-Specific... View More

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