IEEE - Institute of Electrical and Electronics Engineers, Inc. - A compact CMOS MEMS microphone with 66dB SNR

2009 IEEE International Solid-State Circuits Conference - (ISSCC)

Author(s): Citakovic, J. ; Hovesten, P.F. ; Rocca, G. ; van Halteren, A. ; Rombach, P. ; Stenberg, L.J. ; Andreani, P. ; Bruun, E.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2009
Conference Location: San Francisco, CA, USA, USA
Conference Date: 8 February 2009
ISBN (Paper): 978-1-4244-3458-9
DOI: 10.1109/ISSCC.2009.4977452
Regular:

Silicon MEMS microphones that offer small size, ease of integration with CMOS electronics, and the ability to withstand lead-free solder reflow cycles, are becoming increasingly popular for... View More

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