IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling of an electrostatic torsional micromirror for laser projection system

2009 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (MEMS/MOEMS)

Author(s): Marchetti, E. ; Volpi, E. ; Battini, F. ; Bacciarelli, L. ; Fanucci, L. ; De Marinis, M. ; Hofmann, U.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 April 2009
Conference Location: Rome, Italy, Italy
Conference Date: 1 April 2009
Page(s): 182 - 186
ISBN (Paper): 978-1-4244-3874-7
Regular:

This paper presents the Simulink™ model of a new 2D torsional scanning micromirror. This Micro-Opto-Electro-Mechanical-System (MOEMS) is very important towards the integration into a... View More

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