IEEE - Institute of Electrical and Electronics Engineers, Inc. - Monte-Carlo method in AFM calibration

2009 Spanish Conference on Electron Devices (CDE)

Author(s): Gonzalez-Jorge, H. ; Valencia, J.L. ; Alvarez, V. ; Rodriguez, F. ; Yebra, F.J.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 February 2009
Conference Location: Santiago de Compostela, Spain, Spain
Conference Date: 11 February 2009
Page(s): 432 - 435
ISBN (CD): 978-1-4244-2839-7
ISBN (Paper): 978-1-4244-2838-0
DOI: 10.1109/SCED.2009.4800526
Regular:

Surface measurements made using atomic force microscopy are one of the most important fields in quality control for the semiconductor industry. Uncertainty is typically estimated using complicated... View More

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