IEEE - Institute of Electrical and Electronics Engineers, Inc. - Air Pressure Sensor for an Insect Wing

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems. MEMS 2009

Author(s): H. Takahashi ; K. Matsumoto ; I. Shimoyama
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2009
Conference Location: Sorrento, Italy
Conference Date: 25 January 2009
Page(s): 825 - 828
ISBN (Electronic): 978-1-4244-2978-3
ISBN (Paper): 978-1-4244-2977-6
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2009.4805510
Regular:

This paper reports on an air pressure sensor for the measurement of the aerodynamic force on an insect wing. A piezoresistive cantilever was fabricated as a pressure sensor. The size of the... View More

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