IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of Multi-User Multi-Chip SOI CMOS-MEMS Processes

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS)

Author(s): Takahashi, K. ; Mita, M. ; Nakada, M. ; Yamane, D. ; Higo, A. ; Fujita, H. ; Toshiyoshi, H.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2009
Conference Location: Sorrento, Italy, Italy
Conference Date: 25 January 2009
Page(s): 701 - 704
ISBN (Paper): 978-1-4244-2977-6
ISBN (Online): 978-1-4244-2978-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2009.4805479
Regular:

This paper presents a new method of integrating multiple MEMS designs with 40V class CMOS driver circuits in a multi-user-multi-chip manner. The multi-chip multi-user CMOS-MEMS process was... View More

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