IEEE - Institute of Electrical and Electronics Engineers, Inc. - Non-Linear Fluidic Integrated Circuits Realized by Pneumatic-Field Effect Transistors with Controllable Output Resistance

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems (MEMS)

Author(s): Takao, H. ; Tanaka, N. ; Sugiura, M. ; Sawada, K. ; Ishida, M.
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 January 2009
Conference Location: Sorrento, Italy, Italy
Conference Date: 25 January 2009
Page(s): 503 - 506
ISBN (Paper): 978-1-4244-2977-6
ISBN (Online): 978-1-4244-2978-3
ISSN (Paper): 1084-6999
DOI: 10.1109/MEMSYS.2009.4805429
Regular:

This paper reports `non-linear' micro fluidic integrated circuit technology using newly developed vertical microvalve, Pneumatic-Field Effect Transistor (Pneumatic-FET) with controllability of its... View More

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