American Vacuum Society (AVS) - Evaluation of various composition Cu-resin plates in sapphire DMP (Diamond Mechanical Polishing) process

2015 International Conference on Planarization/CMP Technology (ICPT)

Author(s): Dong-Ha Kim ; Byoung-Jun Cho ; Jung-Hwan Lee ; Jin-Goo Park
Publisher: American Vacuum Society (AVS)
Publication Date: 1 September 2015
Conference Location: Chandler, AZ, USA
Conference Date: 30 September 2015
Page(s): 1 - 4
ISBN (Electronic): 978-1-6195-6510-4

In this study, the performance of sapphire lapping process using copper-resin plates in DMP (Diamond Mechanical Polishing) process was evaluated. Material removal rate (MRR) of sapphire increased... View More