IEEE - Institute of Electrical and Electronics Engineers, Inc. - Intelligent integral backstepping sliding-mode control for piezo-flexural nanopositioning stage

2015 IEEE 2nd International Future Energy Electronics Conference (IFEEC)

Author(s): Faa-Jeng Lin ; Shih-Yang Lee
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 November 2015
Conference Location: Taipei, Taiwan
Conference Date: 1 November 2015
Page(s): 1 - 6
ISBN (Electronic): 978-1-4799-7657-7
ISBN (USB): 978-1-4799-7656-0
ISBN (Paper): 978-1-4799-7655-3
DOI: 10.1109/IFEEC.2015.7361416
Regular:

An intelligent integral backstepping sliding-mode control (IIBSMC) system using a recurrent neural network (RNN) is proposed for the three-dimension motion control of a piezo-flexural... View More

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