Engineers Australia - Internal model control for high-speed spiral scan AFM

2015 5th Australian Control Conference (AUCC)

Author(s): Ali Bazaei ; Yuen Kuan Yong ; S. O. Reza Moheimani
Publisher: Engineers Australia
Publication Date: 1 November 2015
Conference Location: Gold Coast, QLD, Australia
Conference Date: 5 November 2015
Page(s): 206 - 209
ISBN (CD): 978-1-9221-0770-1
ISBN (Electronic): 978-1-9221-0769-5
ISBN (USB): 978-1-4673-9552-6

We report on a novel application of internal model control for accurate tracking of a high speed spiral trajectory in scanning probe microscopy. With a closed-loop bandwidth of only 1 kHz, we... View More