IEEE - Institute of Electrical and Electronics Engineers, Inc. - Transparent mask design and fabrication of interdigitated electrodes

2015 IEEE Regional Symposium on Micro- and Nanoelectronics (RSM)

Author(s): P. Y. P. Adelyn ; U. Hashim ; Y. P. Ha ; M. K. Md Arshad ; A. R. Ruslinda ; R. M. Ayub ; Subash C. B. Gopinath ; C. H. Voon ; K. L. Foo
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Conference Location: Kuala Terengganu, Malaysia
Conference Date: 19 August 2015
Page(s): 1 - 4
ISBN (Electronic): 978-1-4799-8550-0
ISBN (USB): 978-1-4799-8549-4
DOI: 10.1109/RSM.2015.7355014
Regular:

Fabrication of Interdigitated Electrodes (IDEs) involves several processes which include oxidation, metallization and photolithography. Among these three processes, photolithography process is the... View More

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