IEEE - Institute of Electrical and Electronics Engineers, Inc. - Laser micromachining of Circular Transmission Line Model (CTLM) of Al contacts on n-type SiC/Si chips

2015 IEEE Regional Symposium on Micro- and Nanoelectronics (RSM)

Author(s): N. F. Mohd Nasir ; K. A. Hassan ; P. W. Leech ; G. K. Reeves ; A. S. Holland ; Y. Wahab ; M. Mazalan ; P. Tanner
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Conference Location: Kuala Terengganu, Malaysia
Conference Date: 19 August 2015
Page(s): 1 - 4
ISBN (Electronic): 978-1-4799-8550-0
ISBN (USB): 978-1-4799-8549-4
DOI: 10.1109/RSM.2015.7355003
Regular:

An array of Circular Transmission Line Model (CTLM) metal contacts was deposited onto the upper surface of the n-SiC/Si chips using laser micromachining as an alternative to standard... View More

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