IEEE - Institute of Electrical and Electronics Engineers, Inc. - Reactive Ion etching of TiO2 thin film: The impact of different gaseous

2015 IEEE Regional Symposium on Micro- and Nanoelectronics (RSM)

Author(s): R. Adzhri ; M. K. Md Arshad ; M. F. M. Fathil ; U. Hashim ; A. R. Ruslinda ; R. M. Ayub ; Subash C. B. Gopinath ; C. H. Voon ; K. L. Foo ; M. N. M. Nuzaihan ; A. H. Azman ; M. Zaki
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Conference Location: Kuala Terengganu, Malaysia
Conference Date: 19 August 2015
Page(s): 1 - 4
ISBN (Electronic): 978-1-4799-8550-0
ISBN (USB): 978-1-4799-8549-4
DOI: 10.1109/RSM.2015.7354999
Regular:

Titanium dioxide (TiO2) is one of a metal oxide material group that shows a promising future in biosensors application. TiO2 possess both physical and chemical resistant that... View More

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