IEEE - Institute of Electrical and Electronics Engineers, Inc. - Modeling and design of very low-voltage MEMS microswitch using dynamic pull-in

2015 12th International Multi-Conference on Systems, Signals & Devices (SSD)

Author(s): Majdi Naoui ; Hatem Samaali ; Fehmi Najar
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2015
Conference Location: Mahdia, Tunisia
Conference Date: 16 March 2015
Page(s): 1 - 3
ISBN (Electronic): 978-1-4799-1758-7
DOI: 10.1109/SSD.2015.7348249
Regular:

This study proposes the use of a new actuation technique to trigger ON/OFF states of a capacitive microswitch. The proposed technique is compatible with CMOS technology thanks to its low and... View More

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