IEEE - Institute of Electrical and Electronics Engineers, Inc. - Behavior analysis of a 3-axis detection push-pull piezoresistive MEMS accelerometer

2015 12th International Multi-Conference on Systems, Signals & Devices (SSD)

Author(s): F. Tounsi ; E. Ayechi ; B. Mezghani ; M. Masmoudi ; M. Kandpal ; V. R. Rao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 March 2015
Conference Location: Mahdia, Tunisia
Conference Date: 16 March 2015
Page(s): 1 - 6
ISBN (Electronic): 978-1-4799-1758-7
DOI: 10.1109/SSD.2015.7348246
Regular:

This paper reports a new concept of a 3-axis accelerometer design along with proposed fabrication steps and a circuit readout configuration. In order to achieve a better performance in terms of... View More

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