IEEE - Institute of Electrical and Electronics Engineers, Inc. - Tools for probing `atomic' action [electron microscopes]

Author(s): J. M. Gibson
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 December 1985
Volume: 22
Page(s): 38 - 44
ISSN (Paper): 0018-9235
DOI: 10.1109/MSPEC.1985.6370726
Regular:

The growth of thin films by vapor deposition, patterning by electron-beam lithography, and doping by low-energy ion implantation have opened the way to microelectronics on an incredibly fine... View More

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