IEEE - Institute of Electrical and Electronics Engineers, Inc. - Comb IDE patterned piezoelectric MEMS cantilever for sensing applications

2015 4th International Conference on Reliability, Infocom Technologies and Optimization (ICRITO) (Trends and Future Directions)

Author(s): Neha Mukhija ; Nidhi Paliwal ; Deepak Bhatia
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 September 2015
Conference Location: Noida, India
Conference Date: 2 September 2015
Page(s): 1 - 4
ISBN (CD): 978-1-4673-7230-5
ISBN (Electronic): 978-1-4673-7231-2
DOI: 10.1109/ICRITO.2015.7359370
Regular:

Power scavenging is a method of extracting energy from the surrounding and converting it into electrical energy. In this paper two element array of dimensions 30×4 μm2 with IDE... View More

Advertisement