IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of short pulse CO 2 laser for efficient rare earth plasma extreme ultraviolet sources

2015 IEEE Photonics Conference (IPC)

Author(s): Reiho Amano ; Thanh-Hung Dinh ; Atsushi Sasanuma ; Goki Arai ; Yusuke Fujii ; Kenichiro Nanto ; Akihiko Takahashi ; Daisuke Nakamura ; Tatsuo Okada ; Tetsuya Makimura ; Taisuke Miura ; Akira Endo ; Tomas Mocek ; Padraig Dunne ; Gerry O'Sullivan ; Takeshi Higashiguchi
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 October 2015
Conference Location: Reston, VA, USA
Conference Date: 4 October 2015
Page(s): 78 - 79
ISBN (Electronic): 978-1-4799-7465-8
ISBN (USB): 978-1-4799-7464-1
DOI: 10.1109/IPCon.2015.7323554
Regular:

We produced a 3-15-ns CO2 laser pulse with 1011 W/cm2 for an efficient extreme ultraviolet (EUV) source by rare earth element of Gd. The EUV emission was observed... View More

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