Taiwan Semiconductor Industry Association - Tool log mining for productivity improvement — James Lin

2015 Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM)

Author(s): Ji Fu Kung ; Cecil Liu ; Stephen Tseng ; Y. B. Hsu
Publisher: Taiwan Semiconductor Industry Association
Publication Date: 1 September 2015
Conference Location: Taipei, Taiwan
Conference Date: 2 September 2015
Page(s): 1 - 2
ISBN (Electronic): 978-9-8691-7151-9

In a high-mix production environment with thousands of recipes and hardware differences due to tool-dedications, it is not straightforward to identify throughput efficiency losses. As a result, it... View More