Taiwan Semiconductor Industry Association - Intelligent sensitivity tracking of manufacturing tool tuning

2015 Joint e-Manufacturing and Design Collaboration Symposium (eMDC) & 2015 International Symposium on Semiconductor Manufacturing (ISSM)

Author(s): C. J. Chuang ; C. T. Ho ; P. F. Tsai ; W. P. Liu ; C. R. Hsieh ; J. I. Mou
Publisher: Taiwan Semiconductor Industry Association
Publication Date: 1 September 2015
Conference Location: Taipei, Taiwan
Conference Date: 2 September 2015
Page(s): 1 - 4
ISBN (Electronic): 978-9-8691-7151-9

The manufacturing processes in semiconductor industry can be enhanced to increase the yields and reduce the non-production wafers by maintaining the accuracy of the sensitivities for offline tool... View More