IEEE - Institute of Electrical and Electronics Engineers, Inc. - Precise tracking control for piezo-actuated stage using inverse compensation and model predictive control

2015 International Conference on Advanced Mechatronic Systems (ICAMechS)

Author(s): Nguyen Manh Linh ; Tran Vu Minh ; Xinkai Chen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Conference Location: Beijing, China
Conference Date: 22 August 2015
Page(s): 467 - 472
ISBN (Electronic): 978-1-4673-7996-0
ISBN (USB): 978-1-4673-7995-3
ISSN (Electronic): 2325-0690
DOI: 10.1109/ICAMechS.2015.7287156
Regular:

In this paper, we consider tracking control problem of piezo-actuated stage which is composed by a piezoelectric actuator (PEA) and a positioning mechanism (PM). This plant can be modeled by... View More

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