IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study on detection of earthquake using DI value and its application to switching control for air type anti-vibration apparatus

2015 International Conference on Advanced Mechatronic Systems (ICAMechS)

Author(s): Masayuki Kubota ; Hirokazu Mineo ; Shinji Wakui ; Yukinori Nakamura
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 August 2015
Conference Location: Beijing, China
Conference Date: 22 August 2015
Page(s): 158 - 163
ISBN (Electronic): 978-1-4673-7996-0
ISBN (USB): 978-1-4673-7995-3
ISSN (Electronic): 2325-0690
DOI: 10.1109/ICAMechS.2015.7287147
Regular:

In semiconductor manufacturing, air type-vibration apparatuses (AVAs) are widely employed. When an earthquake occurs, the AVAs have to be stopped in order to avoid serious damage to semiconductor... View More

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