IEEE - Institute of Electrical and Electronics Engineers, Inc. - AN ultra-low cost deep reactive ion etching (drie) tool for flexible, small volume manufacturing

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): P. A. Gould ; M. D. Hsing ; H. Q. Li ; K. K. Gleason ; M. A. Schmidt
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,268 - 2,271
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181414
Regular:

Our goal is to demonstrate that we can achieve a radical reduction in the capital cost of micro/nano-manufacturing without sacrificing performance by scaling production throughput. As a... View More

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