IEEE - Institute of Electrical and Electronics Engineers, Inc. - Sail-shaped piezoelectric micro-resonators for high resolution gas flowmetry

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): A. Ramezany ; M. Mahdavi ; A. Moses ; S. Pourkamali
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,252 - 2,255
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181410
Regular:

This work presents sail-shaped thin film aluminum nitride resonators operating as high resolution gas flow meters. Deformation of the sail-like structure of the resonator due to the gas flow... View More

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