IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fluidic damping in micro- and nano-scale mechanical resonators in the molecular flow regime: A momentum transfer based analytical approach

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): J. Manz ; G. Wachutka ; G. Schrag
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,168 - 2,171
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181389
Regular:

We derived an easy-to-use analytical model in order to predict the fluidic damping forces acting on mechanical resonators in the free molecular flow regime. The model is based on fundamental... View More

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