IEEE - Institute of Electrical and Electronics Engineers, Inc. - A linear low driving voltage MEMS actuator with large lateral stroke driven by lorentz force

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): X. D. Lv ; W. W. Wei ; X. Mao ; J. L. Yang ; F. H. Yang
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,117 - 2,120
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181376
Regular:

This paper presents a novel MEMS actuator driven by Lorentz force. The actuator has a structure of folded beams, which is favorable for a large lateral stroke. A displacement of more than 47... View More

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