IEEE - Institute of Electrical and Electronics Engineers, Inc. - NEMS actuator driven by electrostatic and optical force with nano-scale resolution

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): J. G. Huang ; B. Dong ; M. Tang ; Y. D. Gu ; J. H. Wu ; T. N. Chen ; Z. C. Yang ; Y. F. Jin ; Y. L. Hao ; D. L. Kwong ; A. Q. Liu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,109 - 2,112
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181374
Regular:

We experimentally demonstrate a silicon nano-wire actuator with a nano-scale resolution and tunable actuation range. The nano-scale resolution is obtained through implementing different control... View More

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