IEEE - Institute of Electrical and Electronics Engineers, Inc. - Graphene RF NEMS shunt switches for analog and digital phase shifters

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): C. F. Moldovan ; W. A. Vitale ; M. Tamagnone ; A. M. Ionescu
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,029 - 2,032
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181354
Regular:

We present the wafer-level fabrication and the first measurements of RF capacitive NEMS switches based on CVD multilayer graphene for wideband RF phase shifters for analog and digital... View More

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