IEEE - Institute of Electrical and Electronics Engineers, Inc. - Employing piezojunction effect for ultra-low power resonant microdevice applications

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Amin Rasouli ; Marek J. Syrzycki ; Behraad Bahreyni
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,021 - 2,024
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181352
Regular:

We are reporting on application of the piezojunction effect as a viable mechanism for detection of resonance frequency in silicon microdevices. In this technique, the sensing pn-junction is... View More

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