IEEE - Institute of Electrical and Electronics Engineers, Inc. - Higher dimensional flexure mode for enhanced effective electromechanical coupling in PZT-on-silicon MEMS resonators

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): J. M. Puder ; S. S. Bedair ; J. S. Pulskamp ; R. Q. Rudy ; R. G. Polcawich ; S. A. Bhave
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 2,017 - 2,020
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181351
Regular:

This paper reports on a low-loss, flexural-mode resonator with enhanced effective electromechanical coupling, keff2. Improvement is achieved by utilizing a higher dimensional... View More

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