IEEE - Institute of Electrical and Electronics Engineers, Inc. - Development of new micro gas preconcentrator using novel electroless gold plating process

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): C.-Y Kuo ; P.-S Chen ; K.-J Chiu ; C.-J Lu ; W.-C Tian
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,456 - 1,459
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181209
Regular:

This article presents a novel electroless gold plating method to fabricate a thin film heater for a new micro preconcentrator (μPCT) utilized in a micro gas chromatograph (μGC). The gold... View More

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