IEEE - Institute of Electrical and Electronics Engineers, Inc. - Fabrication of microtip electrode array integrated with self-aligned reference electrode

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Bum-Ryul Maeng ; Seung-ki Lee ; Seoung-Jai Bai ; Jae-Hyoung Park
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,362 - 1,365
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181185
Regular:

This paper presents a novel microtip-based electrode array with the reference electrode around tips. A microelectromechanical systems process for a microtip electrode array has been... View More

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