IEEE - Institute of Electrical and Electronics Engineers, Inc. - CNC-lithography: Computer-controlled multidirectional light-motion-synchronized lithography for 3-D microfabrication

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): Jungkwun Kim ; Yong-Kyu Yoon ; Thomas C. Mier ; Mark G. Allen
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,358 - 1,361
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181184
Regular:

This paper presents a computer-controlled multidirectional UV-LED (ultraviolet light-emitting diode) lithography system for three-dimensional (3-D) microfabrication, introducing the concept of... View More

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