IEEE - Institute of Electrical and Electronics Engineers, Inc. - Design and fabrication of a sandwich framed focal plane array for uncooled infrared imaging

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): R. Zhao ; W. Ma ; S. Wang ; X. Yu ; Y. Feng ; Y. Zhao
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,318 - 1,321
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181174
Regular:

This paper reports a novel infrared (IR) focal plane array (FPA) by using SiNx/SiO2/SiNx sandwich structure as the frames of bimaterial cantilever pixels, and... View More

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