IEEE - Institute of Electrical and Electronics Engineers, Inc. - Study of Parylene penetration into microchannel

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): W. Wang ; D. Kang ; Y. C. Tai
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,307 - 1,310
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181171
Regular:

This study reports the penetration properties of various Parylenes (i.e., C, N and HT) inside long microchannels. The work broadly covers the effects of the dimer type, loaded dimer mass,... View More

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