IEEE - Institute of Electrical and Electronics Engineers, Inc. - Contact stiffness calibration platform for nanomechanical property measurements with contact resonance atomic force microscopy

2015 Transducers - 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Author(s): M. R. Rosenberger ; S. Chen ; C. B. Prater ; W. P. King
Publisher: IEEE - Institute of Electrical and Electronics Engineers, Inc.
Publication Date: 1 June 2015
Conference Location: Anchorage, AK, USA
Conference Date: 21 June 2015
Page(s): 1,235 - 1,238
ISBN (Electronic): 978-1-4799-8955-3
ISSN (Electronic): 2164-1641
DOI: 10.1109/TRANSDUCERS.2015.7181153
Regular:

This paper presents a method for calibrating the contact stiffness of an atomic force microscope (AFM) cantilever tip interacting with a surface, which is a critical step in the measurement of... View More

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